
TESCAN SOLARIS X
Ultimate resolution and maximum throughput in large-scale sample preparation and characterisation

An Xe Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis.
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Key Features
- NEW iFIB+™ Xe plasma FIB column - 2 μA probe current, fast and precise piezo-driven beam aperture change and gun alignment
- Precise piezo-driven beam aperture changer - fast switching between FIB pre-sets using a strip with 30 FIB apertures for extended lifetime and minimum maintenance
- Next generation Essence™ SW user interface - application-oriented, fully customisable and user-friendly layout
- World's largest FIB and SEM Field of views - unmatched FIB Field of View: 1 mm at 30 keV
- Smart and unique Triglav detection system - multi-detector system consisting of TriSE™ and TriBE™ enables collection of SE and BSE in the entire take-off angle range for maximum information of the sample
- Smart and patented In-Flight Beam Tracing™ - adaptive spot shape optimisation for better performance at high currents
- Enhancement of detection limits in ToF-SIMS analysis - no interference with the detection of other elements such as Ce, Ge and Ga

Analysis of Flexible OLEDs using an Xe plasma FIB-SEM
- All
- AFM/SPM/SNOM
- ARPES
- Automated Mineralogy
- Biological Microscopy
- Bioprinting
- Cell Culture
- CL
- CLEM
- Computed Tomography
- Diffraction Imaging
- Digital Microscopy
- EBSD
- EDS
- Electron Beam Lithography (EBL)
- Electron Microscopy
- Fabrication
- FIB
- Fluorescent Microscopy
- Hyperspectral
- In situ
- Laser spectroscopy
- Light Microscopy
- Live Cell Imaging
- Micro XRD
- Micro XRF
- Microscopy
- Pre-clinical Imaging
- Protein Crystallography
- Quantitative Phase Imaging
- Radiography
- Raman
- SEM
- Spectroscopy
- Super Resolution Microscopy
- TEM
- Thermal Probe Lithography
- Tomographic Microscopy
- WDS
- X-ray absorption spectroscopy (XANES/EXAFS)
- X-ray Imaging
- X-ray Microscopy
- XRD
- XRF