TESCAN SOLARIS X

Ultimate resolution and maximum throughput in large-scale sample preparation and characterisation

An Xe Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis.

Key Features
- NEW iFIB+™ Xe plasma FIB column - 2 μA probe current, fast and precise piezo-driven beam aperture change and gun alignment
- Precise piezo-driven beam aperture changer - fast switching between FIB pre-sets using a strip with 30 FIB apertures for extended lifetime and minimum maintenance
- Next generation Essence™ SW user interface - application-oriented, fully customisable and user-friendly layout
- World's largest FIB and SEM Field of views - unmatched FIB Field of View: 1 mm at 30 keV
- Smart and unique Triglav detection system - multi-detector system consisting of TriSE™ and TriBE™ enables collection of SE and BSE in the entire take-off angle range for maximum information of the sample
- Smart and patented In-Flight Beam Tracing™ - adaptive spot shape optimisation for better performance at high currents
- Enhancement of detection limits in ToF-SIMS analysis - no interference with the detection of other elements such as Ce, Ge and Ga

Analysis of Flexible OLEDs using an Xe plasma FIB-SEM

All
AFM/SPM/SNOM
ARPES
Automated Mineralogy
Biological Microscopy
CL
CLEM
Computed Tomography
Diffraction Imaging
Digital Microscopy
EBSD
EDS
Electron Beam Lithography (EBL)
Electron Microscopy
Fabrication
FIB
Hyperspectral
In situ
Laser spectroscopy
Light Microscopy
Live Cell Imaging
Micro XRD
Micro XRF
Microscopy
Multiphoton Microscopy
Pre-clinical Imaging
Quantitative Phase Imaging
Radiography
Raman
SEM
Spectroscopy
Super Resolution Microscopy
TEM
Thermal Probe Lithography
Tomographic Microscopy
WDS
X-ray absorption spectroscopy (XANES/EXAFS)
X-ray Imaging
X-ray Microscopy
XRD
XRF

TESCAN SOLARIS

FIB

Highest quality TEM lamellae preparation and superior analytical performance

Automated live cell imaging: The CX-A

Biological MicroscopyLive Cell ImagingMicroscopyQuantitative Phase ImagingTomographic Microscopy

A unique walk-away solution for long term live cell imaging

chameleon

Electron MicroscopyMicroscopySEM

Rapid progress to the perfect ice thickness for your cryo-EM sample

NanoFrazor Explore

Electron Beam Lithography (EBL)FabricationThermal Probe Lithography

The NanoFrazor Explore has the ability to perform 3D patterning, in situ inspection, markerless overlay and high resolution Closed-Loop Lithography on nano-sized features combined with an integrated direct laser writer option for large feature patterning

QM Quantum Microscope

ARPESDiffraction ImagingLaser spectroscopy

Completely configurable, the QM comprises a laser source (EUV and/or VUV), amplifier, beamline tailored to the user’s experiment, and imaging or other analysis workstations that can effectively cover the microscopy/spectroscopy landscape for nano-to-quantum materials

AttoMap

EDSMicro XRFWDSXRF

High resolution micro-XRF

WDS MagnaRay Spectrometer

WDS

Achieve unparalleled speed and confidence in elemental analysis in your electron microscope

SPARC

CLHyperspectralRamanSEMSpectroscopy

SPARC: High-performance SEM cathodoluminescence detector

UltraDry EDS Detector

EDS

Develop faster, more accurate interpretation of X-rays for industries such as metals and mining, advanced materials and semiconductors with the Thermo Scientific™ UltraDry EDS Detector, which provides superior resolution at incredibly high collection rates for the Thermo Scientific™ Pathfinder™ X-ray Microanalysis Software.

FF35 CT

Computed TomographyX-ray ImagingX-ray Microscopy

High resolution industrial CT system for small/medium sized parts inspection

FF20 CT

Computed TomographyX-ray ImagingX-ray Microscopy

Ultimate automated semiconductor analysis

Y-Fi™ ULTRAFAST Yb FIBER LASERS

Laser spectroscopyMultiphoton Microscopy

A unique, world-leading, series of high average power, multi-MHz repetition-rate ultrafast fiber lasers

Eucentric Five Axis Table

EDSFIBSEM

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.

TESCAN DynaTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A dedicated 4D X-ray imaging

Model 2550 Cryo Transfer Tomography Holder

Electron MicroscopyIn situTEM

Cryo transfer and tomography of thin-film frozen-hydrated/vitrified specimens for low dose imaging and analysis

Model 1070 NanoClean

Electron MicroscopySEMTEM

Cleans specimens and holders immediately before insertion into an electron microscope; removes existing carbonaceous debris from the specimen and prevents contamination during imaging and analysis

Model 1051 TEM Mill

Diffraction ImagingFIBTEM

Table top precision preparation for producing high quality TEM samples for a wide variety of applications

Model 1080 PicoMill

Diffraction ImagingFIBTEM

The FIB is highly effective in preparing TEM specimens, but the use of a high-energy, liquid metal ion source can often result in specimen amorphization, gallium implantation, or both. Let the FIB do what the FIB does best; let the PicoMill system do the rest

Model 1061 SEM Mill

EBSDEDSMicro XRFSEMWDS

Table top precision preparation for producing high quality SEM samples for a wide variety of applications

Heating Module

In situSEM

A stable heating module capable of temperatures up to 1500°C for a range of in situ SEM studies with gas capable micro-environments enabled

Cryo Module 80 Kelvin

Electron MicroscopyFIBIn situSEM

An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

Electrostatic Beam Blanker

CLSEM

With rise time values <100 picoseconds, this beam blanker is ideally suited to the fast stroboscopic imaging required in voltage contrast, EBIC, OBIC, time-resolved cathodoluminescence and electron-beam lithography

SEM Add-on Tools

In situSEM

Ingenious add-on tools for in situ experimentation that brings new capabilities to your SEM

Transfer Module

Electron MicroscopyFIBIn situSEM

Made for the purpose of carrying delicate and sensitive specimens in a capsule from the SEM into a glove box, or vice versa, to ensure they are protected from air or moisture at all times.

Bending Module

In situSEM

World leading in situ materials testing of bending characteristics using your SEM

NEXT II

AFM/SPM/SNOMBiological Microscopy

NEXT II provides motorised sample positioning and integrated high resolution optical microscope positioning, motorised continuous zoom and focusing of the optical microscope. But AFM automation is more than just motorisation. Powerful Nova PX software algorithms remove a gap between optics and AFM providing continuous zoom from huge panoramic optical view down to atomic resolution.

Anti Curtaining Table

FIB

A four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is
perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam

DE-64

Diffraction ImagingElectron MicroscopyTEM

Ideal for cryo-EM of very large viruses or cellular tomography. The DE-64 delivers user-adjustable full-frame streaming at up to 46 frames per second and offers unparalleled performance for electron counting.

DE-20

Diffraction ImagingElectron MicroscopyTEM

Specifically designed for low-dose applications, the DE-20 features the 9th generation of our revolutionary Direct Detection Device (DDD®) sensor, delivering industry-leading low-noise images, excellent signal-to-noise ratio, and flexible “movie-mode” for fluid, dynamic viewing.

DE-16

Diffraction ImagingElectron MicroscopyTEM

The DE-16 features the 10th generation of our revolutionary Direct Detection Device (DDD®) sensor, delivering industry-leading resolution and flexible, seamless viewing on a 4k x 4k field-of-view. The DE-16 is our most versatile direct detection TEM camera that enables TEM experiments not previously possible on a direct detector.

DE-DirectView

Diffraction ImagingElectron MicroscopyTEM

With high sensitivity and excellent resolution, the DE-DirectView offers cost-effective direct detection for biological and material science applications.

Lumis EBSD Detector

EBSDEDSMicro XRDSEM

Rapidly identify crystallographic phases, grain sizes and orientation, and monitor structural transformations in scanning electron microscope (SEM) samples with EBSD technology designed for maximum throughput and high resolution. The Thermo Scientific™ Lumis EBSD detector incorporates new CMOS sensor technology and advanced optics

Quasor II™ EBSD System

EBSDEDSFIBMicro XRDSEM

Perform simultaneous acquisitions of EBSD data and EDS/WDS spectral images with ease using the Thermo Scientific™ Quasor II™ Electron Backscatter Diffraction. The Quasor II EBSD characterises crystalline structures which affect physical properties in a wide range of materials examined with scanning electron microscopes (SEMs) and X-ray microanalysis

RH-2000

Biological MicroscopyDigital MicroscopyLight MicroscopyMicroscopy

Highly Customisable digital microscope for 2D and 3D examination and analysis of samples from 0x to 10,000x magnification

TESCAN MIRA

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Versatile and powerful FEG SEM

XCITE™

Micro XRFMicroscopy

Synchrotron and versatile performance X-ray source

TESCAN CoreTOM

Computed TomographyIn situX-ray ImagingX-ray Microscopy

Multiscale 3D core imaging

TESCAN UniTOM XL

Computed TomographyIn situX-ray ImagingX-ray Microscopy

A unique alternative in Dynamic 3D X-ray imaging for your lab

Model 1040 NanoMill

Diffraction ImagingElectron MicroscopyFIBTEM

The NanoMill system is the ultimate companion for your FIB to optimise TEM specimen preparation quality

JOLT

CLEDSSEM

Panchromatic and RGB Cathodoluminescence (CL) detector

TESCAN VEGA

CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS

Versatile and powerful tungsten SEM

TESCAN AMBER

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

TESCAN AMBER X; the most versatile and universal analytical Xe plasma FIB-SEM platform in the market

TESCAN AMBER X

EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBIn situMicroscopySEMTEMThermal Probe Lithography

TESCAN AMBER X - the most modern Xe plasma FIB SEM

TESCAN TIMA

Automated MineralogyEDSSEM

NanoFrazor Scholar

Electron Beam Lithography (EBL)FabricationThermal Probe Lithography

The NanoFrazor Scholar has the ability to perform 3D patterning, in situ inspection, markerless overlay and high resolution Closed-Loop Lithography on nano-sized features in a bench top design

Cougar EVO Series

Computed TomographyRadiographyX-ray ImagingX-ray Microscopy

Scalable small footprint X-ray inspection systems for electronic componentry, and medical/military devices

Compact Light Source

Pre-clinical ImagingX-ray absorption spectroscopy (XANES/EXAFS)X-ray ImagingX-ray MicroscopyXRD

MM3E Micromanipulator

Electron MicroscopyFIBIn situSEM

Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

Tensile/Compression Module

EBSDEDSIn situSEM

World leading in situ materials testing of tensile and compression characteristics using your SEM

SuperFlat AFM

AFM/SPM/SNOMIn situSEM

The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens the possibility of combining information on lateral dimensions and material from SEM inspection that can be readily complemented by precise topographical and force information in situ

EBIC Characterisation System

In situSEM

An easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM's and FIB's making it the ideal choice for circuit testing and probing.

Climate

In situTEM

The Climate gas & heating solution enables dynamic studies of cyclic specimen transformations in gaseous environments at elevated temperatures and sub-Angstrom level.

Wildfire

In situTEM

Wildfire In situ TEM Heating

Lightning

In situTEM

In Situ TEM Biasing & Heating
Sample Dynamics under controlled electrical and thermal environment.

Stream

In situTEM

STREAM; In Situ TEM Liquid, Liquid Biasing and Liquid Heating

NanoWorkstation

FIBIn situSEM

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.

UltraDry Compact EDS Detector

EDS

Entry-level SDD EDS that combines UltraDry EDS technology with the Thermo Scientific™ Pathfinder™ X-ray Microanalysis Software, which includes project-based data management, template-based acquisition and operation, Point & Shoot analysis, standardless quantification, and full dead-time corrected Spectral Imaging for the ultimate in EDS data collection and analysis.

NANORO M

Light MicroscopyMicroscopySuper Resolution Microscopy

Nanoro M- Super Resolution Optical Microscopy

ProbeWorkstation

FIBIn situSEM

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

Model 2020 Advanced Tomography Holder

In situTEM

A revolutionary holder that allows room temperature data collection over wide tilt and translation ranges, even in restrictive pole-piece gap geometries

TESCAN SOLARIS X

Key Features

Contact

Brochure

AXT Supplier page

Supplier website

TESCAN SOLARIS

Automated live cell imaging: The CX-A

chameleon

NanoFrazor Explore

QM Quantum Microscope

AttoMap

WDS MagnaRay Spectrometer

SPARC

UltraDry EDS Detector

FF35 CT

FF20 CT

Y-Fi™ ULTRAFAST Yb FIBER LASERS

Eucentric Five Axis Table

TESCAN DynaTOM

Model 2550 Cryo Transfer Tomography Holder

Model 1070 NanoClean

Model 1051 TEM Mill

Model 1080 PicoMill

Model 1061 SEM Mill

Heating Module

Cryo Module 80 Kelvin

Electrostatic Beam Blanker

SEM Add-on Tools

Transfer Module

Bending Module

NEXT II

Anti Curtaining Table

DE-64

DE-20

DE-16

DE-DirectView

Lumis EBSD Detector

Quasor II™ EBSD System

RH-2000

TESCAN MIRA

XCITE™

TESCAN CoreTOM

TESCAN UniTOM XL

Model 1040 NanoMill

JOLT

TESCAN VEGA

TESCAN AMBER

TESCAN AMBER X

TESCAN TIMA

NanoFrazor Scholar

Cougar EVO Series

Compact Light Source

MM3E Micromanipulator

Tensile/Compression Module

SuperFlat AFM

EBIC Characterisation System

Climate

Wildfire

Lightning

Stream

NanoWorkstation

UltraDry Compact EDS Detector

NANORO M

ProbeWorkstation

Model 2020 Advanced Tomography Holder