TESCAN SOLARIS X

Ultimate resolution and maximum throughput in large-scale sample preparation and characterisation

An Xe Plasma FIB-SEM platform for deep sectioning and the highest resolution end-pointing for package level failure analysis.

  • Key Features

    • NEW iFIB+™ Xe plasma FIB column - 2 μA probe current, fast and precise piezo-driven beam aperture change and gun alignment
    • Precise piezo-driven beam aperture changer - fast switching between FIB pre-sets using a strip with 30 FIB apertures for extended lifetime and minimum maintenance
    • Next generation Essence™ SW user interface - application-oriented, fully customisable and user-friendly layout
    • World's largest FIB and SEM Field of views - unmatched FIB Field of View: 1 mm at 30 keV
    • Smart and unique Triglav detection system - multi-detector system consisting of TriSE™ and TriBE™ enables collection of SE and BSE in the entire take-off angle range for maximum information of the sample
    • Smart and patented In-Flight Beam Tracing™ - adaptive spot shape optimisation for better performance at high currents
    • Enhancement of detection limits in ToF-SIMS analysis - no interference with the detection of other elements such as Ce, Ge and Ga
  • All
  • AFM/SPM/SNOM
  • ARPES
  • Automated Mineralogy
  • Biological Microscopy
  • Bioprinting
  • CL
  • CLEM
  • Computed Tomography
  • Diffraction Imaging
  • Digital Microscopy
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Fluorescent Microscopy
  • Hyperspectral
  • In situ
  • Laser spectroscopy
  • Light Microscopy
  • Live Cell Imaging
  • Micro XRD
  • Micro XRF
  • Microscopy
  • Pre-clinical Imaging
  • Quantitative Phase Imaging
  • Radiography
  • Raman
  • SEM
  • Spectroscopy
  • Super Resolution Microscopy
  • TEM
  • Thermal Probe Lithography
  • Tomographic Microscopy
  • WDS
  • X-ray absorption spectroscopy (XANES/EXAFS)
  • X-ray Imaging
  • X-ray Microscopy
  • XRD
  • XRF