The ACT stage is a four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is
perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam ...
True eucentric tilt. After the ACT's tilt axis has been centered under the electron beam, the region of interest can be moved into position, rotated to adjust the orientation, and lifted up to the tilt axis
Accurate positioning. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg
Four-axis positioning. The system consists of a small three-axis substage mounted on a tilting platform. The substage offers a range of 10 mm in X and 3 mm in the Z direction. Additionally, the rotational axis allows unlimited rotation of the sample through 360 deg.