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UHV FIB-SEM NanoSpace
AFM/SPM/SNOMCLEDSElectron MicroscopyFabricationFIBSEMWDS
A true eucentric tilt rocking stage
The ACT stage is a four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam ...