UHV FIB-SEM NanoSpace

A versatile platform ideally suited to FIB-SEM applications in an UHV and contamination free environment

A specially designed platform combining UHV required applications such as MBE, ToF SIMS etc … with the resolution power of a SEM & FIB

  • tescan orsay physics UHV FIB-SEM nanospace

    Key Features

    • Fully modular and customisable platform
    • Vacuum versatility - operation under low, high or ultra-high vacuum
    • FIB-SEM versatility - your choice of FIB and SEM columns
    • UHV capability - ideal platform for ToF SIMS or any other analytical technique under UHV
    • In situ compatibility - suits 3rd party systems such as MBE clusters, surface analysis instrument & more
    • GIS compatible
    • Cryo workflows - build an entire UHV workflow

Fully Customisable

Nanospace is the solution you have been looking for, if you need a contamination free and versatile platform that integrates various ion species and a high-resolution SEM. NanoSpace is a fully customisable UHV chamber that serves as the platform for you to build your own bespoke experimental setup. Its modular architecture allows you to integrate a wide range of options, some of which are outlined below.

Applications

Some potential applications for the UHV FIB-SEM Nanospace might include:

  • FIB-SEM
  • ToF-SIMS
  • Atom probe sample preparation
  • and more

  • Ion implantation
  • Epitaxial growth
  • Auger microscopy

Ion columns

Nanospace UHV FIB-SEM chambers are compatible with a range of ion columns depending on your application. These include:

FIB ColumnIon SpeciesMax. probe currentNotes
i-FIB plasmaXe+ / Ar+ / N2+ / He+ / O2+3 µAPlasma FIB column, Ga free, high-resolution and powerful
OrageGa, Au, Ge, Si, Gold clusters Bi+, ...100 nALMIS FIB column, Ultra-high resolution optimised for high current and low kV imaging/milling
CobraGa, Au, Ge, Si, Gold clusters Bi+, …50 nALMIS FIB column, high-resolution and versatile
ChromaGa, Au, Ge, Si, Gold clusters Bi+, …50 nALMIS FIB column, “pentode” objective design, highly customisable
TaipanGa20 nALMIS FIB column for correlative Optical / FIB column

SEM Columns

You can choose between:

  1. TESCAN Clara analytical SEM column
  2. TESCAN MIRA ultra-high resolution SEM columns

depending on your imaging needs and materials requirements.

Detectors

Nanospace columns are configured with multiple ports optimised for a range of detectors such as:

  • TOF SIMS
  • EDS
  • WDS
  • EBSD
  • Cathodoluminescence

In Situ Experiments

If you are looking for a system for performing in situ measurements and dynamic studies, Nanospace caters for this as well. Some examples might be:

  • All
  • AFM/SPM/SNOM
  • ARPES
  • CL
  • CLEM
  • Diffraction Imaging
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Laser spectroscopy
  • Micro XRD
  • Micro XRF
  • Microscopy
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS