Compact. With a height of only 10 mm the SuperFlat AFM is extremely compact. The ability for use in load lock configurations allows for fast turn around whilst maintaining chamber cleanliness.
Stable. Noise levels in high vacuum of 0.3 nm for contact mode and 0.5 nm for dynamic mode, combined with Nanosurf ’s SPM controller and easy-to-use control software brings SPM characterisation to all SEM users.
Versatile. Providing 3D information from simultaneous SEM and AFM pictures and the ability to use it in both SEM and stand-alone air environments makes it extremely versatile.