SuperFlat AFM

Combining the power of SEM and AFM

  • Key Features

    • Compact. With a height of only 10 mm the SuperFlat AFM is extremely compact. The ability for use in load lock configurations allows for fast turn around whilst maintaining chamber cleanliness.
    • Stable. Noise levels in high vacuum of 0.3 nm for contact mode and 0.5 nm for dynamic mode, combined with Nanosurf ’s SPM controller and easy-to-use control software brings SPM characterisation to all SEM users.
    • Versatile. Providing 3D information from simultaneous SEM and AFM pictures and the ability to use it in both SEM and stand-alone air environments makes it extremely versatile.
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  • Add-Ons
  • In-Situ
  • Instrument/Systems
  • Manipulators & Stages