SuperFlat AFM

Combining the power of SEM and AFM

  • Key Features

    • Compact. With a height of only 10 mm the SuperFlat AFM is extremely compact. The ability for use in load lock configurations allows for fast turn around whilst maintaining chamber cleanliness.
    • Stable. Noise levels in high vacuum of 0.3 nm for contact mode and 0.5 nm for dynamic mode, combined with Nanosurf ’s SPM controller and easy-to-use control software brings SPM characterisation to all SEM users.
    • Versatile. Providing 3D information from simultaneous SEM and AFM pictures and the ability to use it in both SEM and stand-alone air environments makes it extremely versatile.
  • All
  • AFM/SPM/SNOM
  • Biological Microscopy
  • CL
  • CLEM
  • Computed Tomography
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Micro XRD
  • Micro XRF
  • Microscopy
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS
  • X-ray Imaging
  • X-ray Microscopy