Eucentric Five Axis Table

True eucentric positioning for SEM analysis

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.

  • Key Features

    • Stable, accurate positioning. The tilting platform is fitted with a positional encoder with a resolution of 0.1 deg and repeatablity < 0.03 deg. With drift of 1.5 nm/min, no backlash or reversal play and being virtually insusceptible to vibrations making the E5AT stage extremely stable and accurate.
    • Five-axis stage. The system consists of a small four-axis substage mounted on a tilting platform. The substage offers a range of 10 mm by 10 mm in the X and Y directions and 3 mm in the Z direction. Additionally, the rotational axis allows unlimited rotation of the sample through 360 deg.
    • True eucentric positioning. Enabling true eucentric positioning the E5AT stage is ideally suited to electron channel contrast imaging (ECCI), electron backscatter diffraction (EBSD), tomography or any application that requires eucentric re-positioning of samples
  • All
  • AFM/SPM/SNOM
  • CL
  • CLEM
  • Diffraction Imaging
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Micro XRD
  • Micro XRF
  • Microscopy
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS
  • XRF