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UHV FIB-SEM NanoSpace
AFM/SPM/SNOMCLEDSElectron MicroscopyFabricationFIBSEMWDS
True eucentric positioning for SEM analysis
The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.