Model 1061 SEM Mill

A state-of-the-art ion milling and polishing system.

Table top precision preparation for producing high quality SEM samples for a wide variety of applications

  • Key Features

    • Two independently adjustable ion sources - The patented TrueFocus ion sources are optimised to perform at near 100% ionisation efficiency and possesses an independent ion source energy control. The result is a highly efficient ion source that maintains a consistent beam current. TrueFocus ion sources maintain a small ion beam diameter, even at a low accelerating voltage, which means that the ions are directed only to the sample and that sputtered material is not redeposited from the sample holder or chamber onto the sample.
    • Programmable - Sample rotation is 360° with variable rotation speed and a sample rocking feature. The instrument automatically senses the sample thickness and establishes the milling plane, which maximises throughput. A magnetic encoder provides absolute positioning accuracy and adjustable milling angle ranges of 0 to +10° are possible
    • Automatic termination - A timer allows milling to continue for a predetermined time and then turns off the energy to the ion sources when the time has elapsed. The sample remains under vacuum until the load lock is vented. Alternatively, The thermal safeguard associated with the sample cooling system will stop the process if the sample stage reaches a preset temperature.

Cross-section station

A tool for creating pristine cross-section samples ready for ion milling in the SEM Mill. The station enables precise positioning of the area of interest and can be used with a wide variety of materials, including semiconductor devices, multilayers, ceramics, and hard/brittle materials.

Liquid nitrogen-cooled sample stage

Although milling at low angles with low ion beam energies reduces sample heating, temperature-sensitive samples may require further cooling. The SEM Mill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked effectively eliminating heat-induced artifacts

In situ sample viewing

The ion milling process can be monitored in situ in the milling position when using either the optional stereo or the high-magnification microscope. The stereo microscope (7 to 45 X) enhances sample viewing and with its long working distance allows the sample to be observed in situ while milling. The 525 X or 1,960 X high magnification microscope coupled to a CMOS camera and video monitor to view samples and capture images in situ during milling. This system is ideal for preparing site-specific samples.

Vacuum or inert gas transfer capsule

An optional vacuum capsule allows you to transfer the sample to the SEM under vacuum or in an inert gas.

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