MIRA3

Versatile and powerful analytical FEG SEM

World’s most versatile and powerful analytical FEG SEM for both high and low-vacuum operations

  • Key Features

    • Unique Wide Field Optics™ design with a proprietary Intermediate Lens (IML) offering a variety of working and displaying modes, for enhanced field of view or depth of focus, etc.
    • Real-time In-Flight Beam Tracing™ for performance and beam optimisation, which also allows direct and continuous control of the beam and beam current Beam Deceleration Technology (BDT) for excellent resolution at low beam voltages
    • High relolution Eectron Beam Lithography (EBL) platform able to creat sub-10nm features with highly complex structures using the powerful TESCAN DrawBeam software
    • Electron Channelling Pattern aquisition on polycrystalline maerials with just one click column setup
    • Beam Deceleration Technology and InBeam detectors allow imaging under extreley low energy and current beam for high resolution and surface sensitive imaging
    • Extremely robust and low maintenance FEG SEM
  • All
  • Add-Ons
  • Detectors
  • In-Situ
  • Instrument/Systems
  • Manipulators & Stages