Xe plasma FIB-SEM for Semiconductors

The E5AT stage is a five-axis positioning tool especially designed to allow tilting samples to ±90 deg while allowing unlimited rotation of the sample and keeping the area of interest at the eucentric position.

Table top precision preparation for producing high quality TEM samples for a wide variety of applications

The FIB is highly effective in preparing TEM specimens, but the use of a high-energy, liquid metal ion source can often result in specimen amorphization, gallium implantation, or both. Let the FIB do what the FIB does best; let the PicoMill system do the rest

An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

Made for the purpose of carrying delicate and sensitive specimens in a capsule from the SEM into a glove box, or vice versa, to ensure they are protected from air or moisture at all times.

A four-axis positioning tool especially designed to allow rocking a sample while observing it with both the electron and ion beams. It provides an additional tilt axis that is
perpendicular to the FIB-SEM’s stage’s tilt axis allowing for rocking of the sample back and forth on an axis that is perpendicular to the focussed ion beam

Perform simultaneous acquisitions of EBSD data and EDS/WDS spectral images with ease using the Thermo Scientific™ Quasor II™ Electron Backscatter Diffraction. The Quasor II EBSD characterises crystalline structures which affect physical properties in a wide range of materials examined with scanning electron microscopes (SEMs) and X-ray microanalysis

The NanoMill system is the ultimate companion for your FIB to optimise TEM specimen preparation quality

The most versatile and universal analytical Xe plasma FIB-SEM platform in the market

The most modern Xe plasma FIB SEM

Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.