LiteScope – AFM in Your SEM

Fully integrated in situ AFM and SEM

Correlative imaging allows simultaneous acquisition of AFM and SEM data with seamless correlation into 3D images.

  • Nenovision LiteScope correlative AFM and SEM

    Key Features

    • Simple integration into existing SEMs - Plug and play
    • Precise localisation - High precision, time saving approach correlates AFM and SEM regions of interest
    • Fast data collection - Simultaneous collection of complementary datasets
    • In-situ multimodal & correlative analysis - Easily add electrical, mechanical and magnetic properties to SEM images
    • True correlative data collection - In situ design saves time and ensures the same experimental conditions are used
    • Extended 2D to 3D imaging - AFM adds topographical data including surface roughness to 2D SEM images
    • Nanoindentation - Real-time with live imaging
    • High performance AFM - Rivalling stand-alone AFMs

Correlative AFM and SEM

With the ability to measure samples using both measurement techniques in situ using CPEM (Correlative Probe and Electron Microscopy), the LiteScope eliminates the possibility of changes taking place between measurements e.g. oxidation and ensures all measurements are performed under exactly the same conditions.


  • Real 3D topography
  • Depth profiling at sub-nm levels
  • Mechanical properties
  • Electrical properties
  • Magnetic properties


  • Fast 2D imaging
  • Wide scanning range (cm to nm)
  • Chemical analysis
  • Surface modification
  • Vacuum environment


CPEM is relevant to many applications, both academic and industrial including:

  • Metals and alloys
  • 2D materials
  • Life sciences
  • Materials Science
  • Semiconductors
  • Nanomaterials
  • Solar cells
  • New Features of LiteScope 2.5

    Run time – 2:07 min

    Check out the new features, functionalities and capabilities that were introduced with the launch of LiteScope 2.5.

  • How the Correlative Probe and Electron Microscopy CPEM Technique Works

    Run time – 11 Sec

    Representation of how you can perform AFM in an SEM chamber using the Nenovision LiteScope, whereby both datasets are collected in situ avoiding ang effects of changes in environment, as well as speeding up the data collection process and simplifying the correlation of both datasets.

  • LiteScope Overview

    Run time 2:24min
    Discover the advantages and capabilities of both measurement techniques and the benefits of performing them in situ using the LiteScope.

  • CPEM – Correlative Probe and Electron Microscopy

    Run time 3:06min

    The advantages of in situ AFM and SEM or CPEM are described along with how it is achieved.

    LiteScope allows simultaneous acquisition of multiple SEM and AFM datasets seamlessly bringing them together saving vast amounts of time over more traditional methods.

    Click here for more information, including application examples about CPEM.

  • LiteScope Integration

    Run time 1:28min

    This short video shows you just how easy the system is to install into your SEM.

  • advantages of in situ AFM in SEm using the Nenovision Litescope

    Combining the Benefits of SEM and AFM

    The LiteScope brings together the benefits of both SEM and AFM imaging techniques, enabling you to gain a much deeper understanding of your materials in much shorter timeframes than using both methodologies individually.

  • Nenovision litescope AFM in SEM correlative system

    LiteScope Setup and SEM Compatibility

    Thanks to its optimised design, AFM LiteScope is compatible with most SEM systems produced by:

    • Thermo Fisher Scientific/FEI
    • TESCAN
    • ZEISS
    • Hitachi
    • Jeol
    • and others
  • nenovision litescope measurement modes

    NenoVision LiteScope Measurement Modes

    Correlative Mode

    Mechanical Modes

    • Atomic Force Microscopy (AFM)
    • Phase Imaging – NEW
    • Energy Disspation
    • Nanoindentation

    Electro-Mechanical Modes

    • Piezoresponse Force Microscopy (PFM)

    Electrical Modes

    • Conductive AFM (C-AFM)
    • Kelvin Probe Force Microscopy (KPFM)
    • Electrostatic Force Microscopy (EFM) – NEW
    • Scanning Tunneling Microscopy (STM)

    Magnetic Modes

    • Magnetic Force Microscopy (MFM)

    Spectroscopy Modes

    • F-z curves
    • I-V curves
  • All
  • Biological Microscopy
  • CL
  • CLEM
  • Diffraction Imaging
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Laser spectroscopy
  • Micro XRF
  • Microscopy
  • Protein
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS