VEGA3

Versatile and powerful tungsten SEM

World’s most versatile and powerful tungsten SEM for both high- and low-vacuum operations

  • Key Features

    • Unique four-lens Wide Field Optics™ offering varius operational modes embodying the TESCAN proprietary Intermediate Lens (IML) for the beam aperture optimisation
    • Real time In-Flight Beam Tracing™ for the performance and beam optimisation integrating the well-established software Electron Optical Design
    • Fully automated column no mechanical centring elements, enables fully automated column set-up and alignment
    • Ideal chamber geometry for EDX, WDX, EBSD; non-distorted EBSD pattern
    • Sophisticated software for SEM control, image acquisition, archiving, processing and analysis; multi-user environment
    • Unique live stereoscopic imaging utilizing the 3D Beam Technology
  • All
  • AFM/SPM/SNOM
  • ARPES
  • Automated Mineralogy
  • CL
  • CLEM
  • Computed Tomography
  • Diffraction Imaging
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Laser spectroscopy
  • Micro XRD
  • Micro XRF
  • Microscopy
  • Protein Crystallography
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS
  • X-ray Imaging
  • X-ray Microscopy
  • XRF