MIRA XR – Sub-nm FEG-SEM

Simplified UHR-SEM-EDS for rapid and precise materials analysis

Near real-time multiscale analysis

Key Features
- Sub-nm resolution
- Super fast EDS analysis - Fully integrated Dual Essence EDS for routine EDS analysis
- Easy imaging and analysis of challenging samples - Beam-sensitive, outgassing, oily, or degrading specimens
- TESCAN's Wide Field Optics - For faster navigation and ROI identification
- MultiVac - Quickly toggle between high and low vacuum
- Easily automate workflows and customise experiments
- Effortlessly switch between analytical and imaging settings in less than 10 seconds

TESCAN MIRA XR is a high-throughput, ultra-high-resolution SEM-EDS system designed for rapid and precise materials analysis in multi-user environments, such as academic research and quality control labs. With features like fully integrated Dual Essence™ EDS, Wide Field Optics™ and In-Flight™ Automation, you can generate ultra-high-resolution SEM data by at least 30% faster than conventional systems. This includes real-time elemental mapping with no shadowing artifacts

High levels of automation have removed including tedious tasks such as beam alignment and calibration ensure you spend more time imaging and produce repeatable results. TESCAN’s In-Flight Automation controls reduced focus, stigmation and beam alignment to one-click.

Related Products

All
AFM/SPM/SNOM
CL
CLEM
EBSD
EDS
Electron Beam Lithography (EBL)
Electron Microscopy
Fabrication
FIB
Hyperspectral
In situ
Micro XRF
Microscopy
Raman
SEM
Spectroscopy
TEM
Thermal Probe Lithography
WDS

Mini Transfer Module for Sensitive SEM Samples

Mini Transfer Module for Sensitive SEM Samples

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Mini Transfer Module transporting air and moisture sensitive samples to and from SEM and glove box

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Model 1062 TrionMill

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TESCAN VEGA Compact

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TESCAN SOLARIS X - Xe Plasma FIB-SEM for Semiconductors

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SPARC

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Eucentric Five Axis Table

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Model 1070 NanoClean

Model 1070 NanoClean

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Cleans specimens and holders immediately before insertion into an electron microscope; removes existing carbonaceous debris from the specimen and prevents contamination during imaging and analysis

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Table top precision preparation for producing high quality SEM samples for a wide variety of applications

Heating Module

Heating Module

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A stable heating module capable of temperatures up to 1500°C for a range of in situ SEM studies with gas capable micro-environments enabled

Cryo Module 80 Kelvin

Cryo Module 80 Kelvin

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An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

SEM Peltier Module

SEM Peltier Module

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With rapid temperature changes and precise control using a PID-controller, combined with quick lock connectors for fast turn around, makes this the perfect peltier stage

Electrostatic Beam Blanker

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SEM Add-on Tools

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Ingenious add-on tools for in situ experimentation that brings new capabilities to your SEM

Transfer Module

Transfer Module

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Bending Module

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Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

Tensile/Compression Module

Tensile/Compression Module

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World leading in situ materials testing of tensile and compression characteristics using your SEM

SuperFlat AFM

SuperFlat AFM

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The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens the possibility of combining information on lateral dimensions and material from SEM inspection that can be readily complemented by precise topographical and force information in situ

EBIC Characterisation System

EBIC Characterisation System

In situSEM

An easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM's and FIB's making it the ideal choice for circuit testing and probing.

NanoWorkstation

NanoWorkstation

FIBIn situSEM

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.