SEMs and TEMs are commonplace in materials research providing high resolution insights into micro and nanostructures. While additional detectors can provide chemical analysis etc., electron microscopes have traditionally been restricted to static studies…….until recently.

The ability to observe samples under dynamic environments at the micron-scale at high resolution has driven the development of a range of stages and platforms that can operate within the confines and vacuum environment of SEM and TEM chambers.

In Situ TEM Experiments

DENSsolutions manufacture a range of TEM holders that enable users to study the effects of temperature (up to 1300°C), voltage/current as well different gas and liquid environments and combinations thereof. With precision controllers, the effects on structure of these parameters can be directly seen in real time, with long-term in situ studies also possible. Furthermore, the DENSsolutions for platforms for heating and biasing are now available for SEMs with the first such system delivered to an Australian client.

Climate

The Climate gas & heating solution enables dynamic studies of cyclic specimen transformations in gaseous environments at elevated temperatures and sub-Angstrom level.

Wildfire

Wildfire In situ TEM Heating

Lightning

In Situ TEM Biasing & Heating
Sample Dynamics under controlled electrical and thermal environment.

Stream

STREAM; In Situ TEM Liquid, Liquid Biasing and Liquid Heating

In Situ SEM Experiments

For SEMs, Kammarath & Weiss offer a wide range of stages that can be located in the EM chamber to measure mechanical properties such as ­­­tensile, compression, torsion, bending and hardness. They also offer heating and cooling stages with operating ranges from liquid helium through to 1500°C as well as being able to build custom stages to suit client specific experiments. In addition to this, manipulators and probes from Kleindiek can manoeuvre and test electrical properties of materials and components at the micro-scale.

Heating Module

A stable heating module capable of temperatures up to 1500°C for a range of in situ SEM studies with gas capable micro-environments enabled

Cryo Module 80 Kelvin

An extremely low vibration level cryo module that runs on liquid nitrogen, adding new capabilities to your SEM

SEM Peltier Module

With rapid temperature changes and precise control using a PID-controller, combined with quick lock connectors for fast turn around, makes this the perfect peltier stage

Electrostatic Beam Blanker

With rise time values <100 picoseconds, this beam blanker is ideally suited to the fast stroboscopic imaging required in voltage contrast, EBIC, OBIC, time-resolved cathodoluminescence and electron-beam lithography

Transfer Module

Made for the purpose of carrying delicate and sensitive specimens in a capsule from the SEM into a glove box, or vice versa, to ensure they are protected from air or moisture at all times.

Bending Module

World leading in situ materials testing of bending characteristics using your SEM

Tensile/Compression Module

World leading in situ materials testing of tensile and compression characteristics using your SEM

Furthermore, a range of tools and probes from Kleindeik Nanotechnik allow you to manipulate and perform in situ electrical testing within the confines of your SEM chamber. This enables you to collect data from precise locations with ease and to simultaneously image the samples in question using your SEM.

SEM Add-on Tools

Ingenious add-on tools for in situ experimentation that brings new capabilities to your SEM

MM3E Micromanipulator

Adding capabilities from in situ lift-out, electrical probing (FA)and nano-manipulation, the encoded MM3E micro-manipulator brings new functionality to your SEM or FIB/SEM instrument

SuperFlat AFM

The combination of Atomic Force Microscopy (AFM) and Scanning Electron Microscopes (SEM) opens the possibility of combining information on lateral dimensions and material from SEM inspection that can be readily complemented by precise topographical and force information in situ

EBIC Characterisation System

An easy-to-use EBIC and RCI nanoprobing analysis tool which is compatible with most commercially available SEM's and FIB's making it the ideal choice for circuit testing and probing.

NanoWorkstation

The NanoWorkstation is a powerful, dedicated system that allows physical manipulation and characterisation at the micro and nano-scale with ease adding new capabilities to your SEM or FIB/SEM instrument.

ProbeWorkstation for Electrical Characterisation of Semiconductors

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

In Situ SEM and AFM

Correlative Probe and Electron Microscopy or CPEM allows simultaneous acquisition of AFM and SEM data with seamless correlation into 3D images. Through a range of different modes, AFM enables the measurement of mechanical, electrical and magnetic properties at the nanoscale as well as topography to structural information from your SEM. The LiteScope from NenoVision is compatible with most existing SEMs and further extends its capabilities.

LiteScope - AFM in Your SEM

Correlative in situ AFM and SEM

Summary

These systems can all convert your electron microscope into a nanolaboratory capable of performing precision experiments with high-resolution imaging capabilities.