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Micro-area XRF for precise elemental analysis, failure analysis and large-area mapping
Rigaku Qualana is an advanced micro-XRF providing precise elemental analysis from targeted locations down to 20µm over areas up to 200x200mm
The Rigaku Qualana is an advanced micro-area X-ray fluorescence (microXRF) spectrometer designed to provide precise elemental analysis from targeted locations through to large-area elemental mapping. With an X-ray beam focused to as small as 20 µm, Qualana enables users to investigate small features, components, contaminants and defects that may be missed by conventional XRF analysis.
Qualana combines high analytical performance with intuitive operation, making it ideally suited to materials research, quality control, failure analysis and process investigation. Its unique optical configuration places both the X-ray optics and sample observation camera directly above the sample, ensuring accurate positioning even when analysing uneven or three-dimensional samples such as electronic components and printed circuit boards.
Qualana is designed for applications where conventional bulk XRF analysis cannot provide sufficient spatial resolution. By focusing the X-ray beam to as little as 20 µm, users can analyse individual features, defects, particles or components without averaging the elemental composition over a larger area.
The system’s top-down X-ray irradiation and imaging configuration provides an additional advantage when working with uneven or complex samples. The position selected in the camera image remains accurately aligned with the X-ray irradiation position, helping users confidently analyse the feature of interest.
Qualana combines micro-area analysis with the ability to map large sample areas up to 200 × 200 mm. This allows users to screen large components or substrates for elemental distributions, contamination and unexpected features.
Different X-ray beam diameters can be selected according to the application, providing high-resolution mapping for detailed investigations or faster measurements when screening larger areas. This makes it possible to identify features that may not be visible through conventional optical inspection before returning to those areas for higher-resolution analysis.
Qualana incorporates a thin-window silicon drift detector (SDD) designed to provide high sensitivity for light elements. This capability extends the range of applications beyond the analysis of heavier elements and is particularly useful for investigating organic contamination, residues and materials containing lighter elements.
For example, Rigaku has demonstrated the use of Qualana to distinguish organic material in defective regions of electronic components, providing elemental information that can help identify the source of a failure.
Qualana incorporates Rigaku’s established fundamental parameters (FP) approach for quantitative analysis. This provides flexibility for determining elemental composition and film thickness, including applications involving multiple layers.
The combination of micro-area XRF, elemental mapping and quantitative thin-film analysis makes Qualana a versatile tool for investigating coatings, electronic materials and small components.
The Rigaku Qualana is suited to a wide range of research, industrial and quality-control applications, including:
Qualana’s micro-area XRF capabilities can also be applied to chemical research, archaeology, forensic science and other applications requiring localised non-destructive elemental analysis.
The Qualana bridges the gap between conventional bulk XRF analysis and highly localised elemental investigation. Its combination of 20 µm micro-area analysis, large-area mapping, accurate sample positioning, light-element sensitivity and quantitative thin-film analysis provides researchers and industrial users with a flexible platform for understanding both individual features and overall elemental distributions.
For laboratories working with increasingly complex materials and components, Qualana provides a powerful way to move from “Where is the problem?” to “What is it made of?” using a single analytical platform.