ZSX Primus III+ – Rapid Quantitative Elemental Analysis – Rigaku

Rigaku ZSX Primus III+ delivers rapid quantitative determination of major and minor atomic elements, from oxygen (O) through uranium (U), in a wide variety of sample types — with minimal standards.

Tube Above Optics for Superior Reliability

ZSX Primus III+ features an innovative optics-above configuration. Never again worry about a contaminated beam path or down time due to sample chamber maintenance. The optics-above geometry eliminates cleaning worries and increases up time.

High Precision Sample Positioning

The high precision positioning of the sample ensures that the distance between the sample surface and X-ray tube is kept constant. This is important for applications that require high precision, such as the analysis of alloys. ZSX Primus III+ performs high-precision analysis using a unique optical configuration designed to minimize errors caused by non-flat surfaces in samples such as fused beads and pressed pellets

SQX Fundamental Parameters with EZ-Scan Software

EZ-scan allows users to analyze unknown samples without any prior setup. This time saving feature requires only a few clicks of the mouse and a sample name to be entered. Combined with SQX fundamental parameters software, it provides the most accurate and rapid XRF results possible. SQX is capable of automatically correcting for all matrix effects, including line overlaps. SQX can also correct for secondary excitation effect by photoelectrons (light and ultra-light elements), varying atmospheres, impurities and different sample sizes. Increased accuracy is achieved using matching library and perfect scan analysis programs.


  • Analysis of elements from O to U
  • Tube above optics minimizes contamination issues
  • Small footprint uses less valuable lab space
  • High precision sample positioning
  • Special optics reduce errors caused by curved sample surfaces
  • Software tools for statistical process control (SPC)
  • Evacuation and vacuum leak rates can be optimized for throughput


Elemental coverage4Be through 92U
OpticsWavelength dispersive, sequential, tube above
X-ray generator
X-ray tubeEnd window, Rh-anode, 3kW, 60kV
HV power supplyHigh frequency inverter, ±0.005% stability
CoolingInternal water-to-water heat exchanger
Sample changer48 positions standard, 96 optional
Maximum sample size51 mm (diameter) by 30 mm (high)
Analysis sample area35 mm (diameter)
Sample rotation speed30 rpm
Primary X-ray filtersAl, Ti, Cu and Zr
Beam collimators4 auto-selectable diameters: 35, 30, 20 and 10 mm
Divergence slit3 auto-selectable: standard, high, and course (optional) resolutions
Receiving slitFor SC and for F-PC detectors
Goniometerθ – 2θ independent drive mechanism
Angular rangeSC: 5-118°, F-PC: 13-148°
Maximum scan speed1400°/min (2θ)
Angular reproducibility±0.0005°
Continuous scan0.1 - 240°/min
Crystal changer10 crystals, automatic mechanism
Vacuum systemHigh-speed system
Detector systems
Heavy element detectorScintillation counter (SC)
Light element detectorFlow proportional counter (F-PC)
AttenuatorIn-out automatic exchanger (1/10)

Overview of the ZSX Primus Series WDXRF Spectrometers