ZSX Primus – High Performance WDXRF Wavelength Dispersive X-Ray Fluorescence Spectrometer

Rigaku ZSX Primus delivers rapid quantitative determination of major and minor atomic elements, from beryllium (Be) through uranium (U), in a wide variety of sample types — with minimal standards.


Powerful, Flexible and Reliable Elemental Analysis

The latest instrument in Rigaku’s ZSX series, the ZSX Primus continues the tradition of delivering accurate results in a timely and seamless manner, with unsurpassed reliability, flexibility, and ease of use to meet any challenges in today’s laboratory.

Low-Z Performance with Mapping and Multi-Spot Analysis

Providing superior performance with the flexibility for analyzing the most complex samples, the ZSX Primus features a 30 micron tube, the thinnest end-window tube available in the industry, for exceptional light element (low-Z) detection limits. Combined with the most advanced mapping package to detect homogeneity and inclusions, the ZSX Primus allows easy detailed investigation of samples that provide analytical insights not easily obtained by other analytical methodologies. Available multi-spot analysis also helps to eliminate sampling errors in inhomogeneous materials.

SQX Fundamental Parameters with EZ-Scan Software

EZ-scan allows users to analyze unknown samples without any prior setup. This time saving feature requires only a few clicks of the mouse and a sample name to be entered. Combined with SQX fundamental parameters software, it provides the most accurate and rapid XRF results possible. SQX is capable of automatically correcting for all matrix effects, including line overlaps. SQX can also correct for secondary excitation effect by photoelectrons (light and ultra-light elements), varying atmospheres, impurities and different sample sizes. Increased accuracy is achieved using matching library and perfect scan analysis programs.


  • Analysis of elements from Be to U
  • Small footprint uses less valuable lab space
  • Micro analysis to analyze samples as small as 500 μm
  • Tube-below design is optimized for liquids and loose powders
  • 30μ tube delivers superior light element performance
  • Mapping feature for elemental topography/distribution
  • Helium seal means the optics are always under vacuum


Elemental coverage4Be through 92U
OpticsWavelength dispersive, sequential, tube below
X-ray generator
X-ray tubeEnd window, Rh-anode, 3kW or 4 kW, 60kV
HV power supplyHigh frequency inverter, ±0.005% stability
CoolingInternal water-to-water heat exchanger
Sample changer48 positions (standard), expandable
Sample inletAir lock system
Maximum sample size51 mm (diameter) by 30 mm (high)
Analysis sample area35 mm (diameter)
Sample rotation speed30 rpm
Primary X-ray filtersAl, Ti, Cu, Zr and Be (optional, for window protection)
Beam collimators6 auto-selectable diameters: 35, 30, 20, 10, 1 and 0.5 mm
Divergence slit3 auto-selectable: standard, high, and course (optional) resolutions
Receiving slitFor SC and for F-PC detectors
Goniometerθ – 2θ independent drive mechanism
Angular rangeSC: 5-118°, F-PC: 13-148°
Maximum scan speed1400°/min (2θ)
Angular reproducibility±0.0005°
Continuous scan0.1 - 240°/min
Crystal changer10 crystals, automatic mechanism
Vacuum system2 pump high-speed system w/ (optional) powder trap
He flush systemOptional, with partition
Temperature stabilizer36.5°C ± 0.1°C
Detector systems
Heavy element detectorScintillation counter (SC)
Light element detectorFlow proportional counter (F-PC)
AttenuatorIn-out automatic exchanger (1/10)

Overview of the ZSX Primus Series WDXRF Spectrometers