TESCAN SOLARIS X
EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBMicroscopySEMTEMWDS
Xe plasma FIB-SEM for Semiconductors
Entry-level SDD EDS that combines UltraDry EDS technology with the Thermo Scientific™ Pathfinder™ X-ray Microanalysis Software, which includes project-based data management, template-based acquisition and operation, Point & Shoot analysis, standardless quantification, and full dead-time corrected Spectral Imaging for the ultimate in EDS data collection and analysis.
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Key Features
- Outstanding detection and spectral performance - With sensitivity down to boron, advanced silicon drift detection electronics, collection rates up to 1,000,000 cps and 133 eV resolution (Mn-Ka) all on a compact entry-level EDS
- Convenience - EDS technology as an attachment to your SEM that comes as a small package with “Take-your-data-anywhere” support to free your microscope for further use. Absolutely no liquid nitrogen required
- Software & System Benefits - Reinforce accuracy of data showing “goodness-of-fit”: spectral simulation and spectra check overlay with a chi2 residual value. Easy-to-use: project-based layout, industry standard data formats, one-click reporting to Microsoft Word, and Point & Shoot analysis. Phase mapping using the exclusive Thermo Scientific™ COMPASS software algorithms
- All
- Automated Mineralogy
- CL
- CLEM
- EBSD
- EDS
- Electron Beam Lithography (EBL)
- Electron Microscopy
- Fabrication
- FIB
- In situ
- Micro XRD
- Micro XRF
- Microscopy
- SEM
- TEM
- Thermal Probe Lithography
- WDS
- XRF
