The latest tool for high-precision in-situ electrical nanoprobing.

The ProbeWorkstation is a powerful, dedicated system for electrical characterisation of semiconductor devices and advanced materials in SEM and FIB. The optimal combination of our market-leading nano-manipulation and probing products provide a versatile, integrated solution for failure analysis and R&D applications requiring stable, low-current measurements.

  • Key Features

    • Unmatched stability and precision. Compact, extremely stable design guarantees < 1 nm/min drift with no backlash, creep or reversal play.
    • Load-lock compatibility. SEM and FIB load-lock compatibility allows for fast cycle times and increased chamber cleanliness and simple integration into your existing SEM or FIB/SEM tool.
    • Single unified software interface (APT) for driving the probe tips and controlling all measurement functions (incl. Keithley 4200 operation) and allowing for electrical fault isolation using EBIC, EBAC, EBIV, RCI, EBIRCH, etc. Easy integration using the microscope‘s auxiliary video input, EBIC image acquisition by SEM software.
    • In-situ circuit editing. Capable of probing at FIB tilt angles for in-situ circuit edit applications and with a low profile design allows for small working distances down to 2 mm - enabling low-kv imaging.
  • All
  • CL
  • CLEM
  • Diffraction Imaging
  • EBSD
  • EDS
  • Electron Beam Lithography (EBL)
  • Electron Microscopy
  • Fabrication
  • FIB
  • Hyperspectral
  • In situ
  • Micro XRF
  • Microscopy
  • Raman
  • SEM
  • Spectroscopy
  • TEM
  • Thermal Probe Lithography
  • WDS