
Solaris X
EBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyFabricationFIBMicroscopySEMTEMWDS
Xe plasma FIB-SEM for Semiconductors
An evolutionary step in lithographic techniques
Rapid prototyping of nanostructures that can simultaneously produce and measure/image patterns and structures with nanosized geometries in a computer controlled environment and capable of 3D patterning, in situ inspection, markerless overlay and high resolution Closed-Loop Lithography (CLL) scanning