
TESCAN VEGA Compact
CLCLEMEBSDEDSElectron Beam Lithography (EBL)Electron MicroscopyIn situMicro XRFSEMWDS
EBSD technology designed for maximum throughput and high resolution
Rapidly identify crystallographic phases, grain sizes and orientation, and monitor structural transformations in scanning electron microscope (SEM) samples with EBSD technology designed for maximum throughput and high resolution. The Thermo Scientific™ Lumis EBSD detector incorporates new CMOS sensor technology and advanced optics