Model 1061 – SEM Mill for SEM Sample Preparation

The 1061 is a state-of-the-art ion milling and polishing system for producing the highest quality SEM samples. Designed for creating pristine cross-section samples with the optional in situ Cross-section station.

Demonstration of the effectiveness of ion milling for SEM sample preparationKey Features

  • Two independently adjustable TrueFocus ion sources
  • Independently adjustable beam diameters ~100% ionisation efficiency
  • High-energy operation for rapid milling
  • Low-energy operation for sample polishing
  • Adjustable milling angle range of 0° to 10°
  • Adjustable energy range from 100 eV to 10 kV
  • Ion beam spot size range from 300 μm to 5 mm
  • Beam current density up to 10 mA/cm2
  • Milling rates in excess of 500 μm/hour
  • Manual and extremely precise milling angle adjustment

Chamber & Vacuum system

  • comparison of mechanical polishing and ion millingVacuum or inert gas transfer capsule (optional)
  • In situ viewing and image capture during milling
  • Microscope and camera options
  • Fully integrated liquid nitrogen-cooled sample stage (optional)
  • Quick sample transfer via a vacuum load lock

Sample Stage and Size

The SEM Mill accepts the following sample sizes:

  • Cross section
    • Maximum – 10 x 10 x 4.0 mm
    • Minimum – 3 x 3 x 0.7 mm
  • Planar
    • 32 (dia) x 25 (height) mm
  • Sample rocking or rotation
  • Automatic sample thickness sensing for maximum throughput
  • Magnetic encoding for absolute positioning accuracy.


  • Automatic and manual termination by time or temperature
  • Touch screen control with a self-intuitive SW for automated, unattended operation and Programmable sample motion
  • Software controlled ion beam energy, milling angle, specimen motion, specimen position, and process termination
  • Adjustable 10-inch touch screen with a user-friendly interface for simple setup of milling parameters
  • Allows for creating multi-step milling sequences including the automatic adjustment of milling angles throughout the milling process
  • Other software features; Managing specimen data, maintenance and log files, and image storage, as well as remote access to oversee milling operations

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