Micromanipulator for SEMs and FIBs – MM3A-EM

Over the last few years, the MM3A-EM micromanipulator from Kleindiek has created an unparalleled new dimension of quality in the field of Electron Microscopy. It has enabled electron microscopists new degrees of freedom, and the ability to easily manipulate their samples to reveal new details without the need to open the vacuum chamber and expose their samples to the atmosphere.

The MM3A-EM micromanipulator is employed in a wide spectrum of SEM, FIB and other microscopes for an even wider range of applications and it has become the industry standard for OEM and retrofit solutions with over 1000 units in service across the globe.

The MM3A-EM to adds new capabilities, flexibility and functionality to your instrument, in turn increasing your analytical power.


Key Advantages

Compact and flexible design

  • Small and practical
  • Plug-and-play system with modular components
  • Interfacing solutions for most microscopes
  • Fast setup and removal
  • Effortless work with multiple manipulators
  • Useful plug-in tools

Clear and simple

  • Result-oriented operation and increased throughput
  • Intuitive control interfaces and software
  • User-friendly and easy to learn
  • Quick and easy tool exchange
  • Compact, stand-alone electronics with PC interface
  • Pioneering cabling technology

Robust and stable

  • Compact construction delivers higher resonance frequencies
  • Excellent stability
  • Low drift (1 nm/min)
  • Reliable operation (one year endurance test)
  • Virtually insusceptible to vibrations
  • Fast pre-positioning by hand

Fast and precise

  • No backlash or reversal play
  • Sub-nanometer resolution (0.25 nm)
  • Extensive working range (100 cm³)
  • No “blind axis” like with cartesian systems
  • Integrated coarse and fine displacement in one drive
  • High operating velocity (up to 10 mm/sec)

Key Features

Dimensions62.1x20.4x25.4 mm (LxWxH)
Weight45 g
Operating RangeA & B = 204°
C = 12mm
SpeedA & B = 10 mm/s (max)
C = 2 mm/s (max)
ResolutionA = 10-7 rad (5nm)
B = 10-7 rad (3.5nm)
Resolution C = <0.5 nm
Holding Force1 N
Holding torque3 - 4 nm
LiftY: 5 g
Probing current range10 nA to 100 mA
Maximum probing voltage100 V
Probing signal resistance7.0 Ω
Temperature range273 to 353 K
UHV version: 273 to 393 K
Low temp version: 77 to 393 K
Lowest pressure10-7 mbar
UHV version: 2 x 10-10 mbar
MountingM4 tapped hole
MaterialStainless steel + aluminium

A=left/right B=up/down C=in/out

Micromanipulator for SEM/FIB

Microgripper Plug-in for the MM3A-EM

Manipulating 400nm Spheres

Manipulation of a Butterfly’s Wing

Parking Position for Roof Mounted MM3A-EMs

Harmonious Operation of 11 MM3A’s

MM3A-EM – Compucentric Rotation with RoTip

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