Quantitative X-ray Mapping WDS Performance EDS Convenience

  • Introduction

    Geologists, chemists, materials scientists, and others have used Electron Probe Microanalysis (EPMA) with multiple, automated wavelength dispersive spectrometry (WDS) detectors for many years. WDS analysis in the microprobe predates energy dispersive spectrometry on scanning electron microscopes (SEM/EDS) and still sets the standard for resolution and sensitivity in microanalysis. Traditionally, quantitative analysis in the microprobe has been recognized as more precise than the more common SEM/EDS.

    Developments in the Thermo Scientific NORAN™ System 7 X-ray microanalysis system, aimed at improved compositional analysis with EDS, now approach EPMA WDS analytical methods on SEM/EDS systems.